环形溅射靶选型表
品牌 |
型号 |
尺寸 |
| Anatech / Technics | Hummer V / VI / 6.2 / 8 | 3” O.D. X 2” I.D |
| Polaron / Biorad | E5100 / E5150 / E5175 / SC510 / SC515 | 82mm O.D. X 60mm I.D |
| Polaron / Quorum | SC7640 / SC7680 | 82mm O.D. X 60mm I.D |
Polaron 镀膜仪也以 Bio-Rad、Fisons、VG Microtech、Thermo VG、Emscope 和 Quorum 品牌出售。
圆形溅射靶选型表
品牌 |
型号 |
尺寸 |
| Agar | Manual / Automatic | Ø57mm |
| Agar | High resolution sputter coater | Ø57mm |
| Anatech/Technics | Hummer I / II / III / Jr | Ø50mm |
| Bal-Tec | SCD 005 / 040 / 050 / 500 | Ø54mm |
| Bal-Tec | MED 10 / MED 20 | Ø54mm |
| Bio-Rad | SC5200 / SC502 | Ø57mm |
| Bio-Rad | E7400 / LT7400 | Ø24mm |
| Cressington | 108manual / 108auto | Ø57mm |
| Cressington | 108auto/SE | Ø57mm |
| Cressington | 208HR | Ø57mm |
| Denton | Desk II / II / IV / V | Ø60mm |
| Edwards | 150B / Scancoat | Ø60mm |
| Emitech | SC7620 / SC7610 | Ø57mm |
| Emitech on Ø60mm target holder | K500X / K550X / K650X | Ø60mm |
| Emitech | K575X &XD / K675X & XD | Ø57mm |
| Emitech | Q150 | Ø57mm |
| EMS | 150R / 150T / 300R / 300R | Ø57mm |
| EMS | K575X &XD / K675X & XD | Ø57mm |
| EMS | SC7620 / SC7610 | Ø57mm |
| EMS on Ø60mm target holder | K500X / K550X / K650X | Ø60mm |
| Emscope on Ø58mm target holder | SC500 / SC500A | Ø58mm |
| Emscope | SC502 | Ø57mm |
| Fullam | EffaCoater / EMS-76 | Ø50mm |
| Gatan | 681 Ion Beam Coater | Ø19mm |
| Gatan | 682 PECS Ion Beam Coater | Ø19mm |
| Gatan | 685 PECS II Ion Beam Coater | Ø19mm |
| Hitachi | MC 1000 | Ø62mm |
| HHV | BT150 / BT300 | Ø54mm |
| HoYeon | HC21 | Ø57mm |
| ISI | ISI 5400 | Ø57mm |
| JEOL | JFC-1200 / 1300 / 1400 / 1600 | Ø57mm |
| JEOL | JFC-2300HR | Ø57mm |
| Leica | EM SCD 005 / 050 / 500 | Ø54mm |
| Leica | EM MED 020 | Ø54mm |
| Leica | ACE 200 / ACE 600 | Ø54mm |
| Pelco | SC4 / SC5 / SC6 / SC7 | Ø57mm |
| Polaron / Bio-Rad | E5000 / E5200 / E5400 / E5800 | Ø57mm |
| Polaron / Bio-Rad | PS 3 | Ø57mm |
| Polaron / Quorum | SC7620 / SC7610 | Ø57mm |
| Quorum | Q150R / Q150T / SC7620 | Ø57mm |
| Quorum | Q300R / Q300T | Ø57mm |
| Quorum | PP2000 / PP2000T | Ø24mm |
| Quorum | PP3000T / PP3010T | Ø24mm |
| Safematic | CCU-010 | Ø54mm |
| SEC | MCM-100 / MCM-200 | Ø50mm |
| SPI | SPI-Module | Ø57mm |
| SPI | SPI Super | Ø50mm |
| VG Microtech / Fisons / Thermo | PP2200 / PP2000T | Ø24mm |
