环形溅射靶选型表
品牌 | 型号 | 尺寸 |
Anatech / Technics | Hummer V / VI / 6.2 / 8 | 3” O.D. X 2” I.D |
Polaron / Biorad | E5100 / E5150 / E5175 / SC510 / SC515 | 82mm O.D. X 60mm I.D |
Polaron / Quorum | SC7640 / SC7680 | 82mm O.D. X 60mm I.D |
Polaron 镀膜仪也以 Bio-Rad、Fisons、VG Microtech、Thermo VG、Emscope 和 Quorum 品牌出售。
圆形溅射靶选型表
品牌 | 型号 | 尺寸 |
Agar | Manual / Automatic | Ø57mm |
Agar | High resolution sputter coater | Ø57mm |
Anatech/Technics | Hummer I / II / III / Jr | Ø50mm |
Bal-Tec | SCD 005 / 040 / 050 / 500 | Ø54mm |
Bal-Tec | MED 10 / MED 20 | Ø54mm |
Bio-Rad | SC5200 / SC502 | Ø57mm |
Bio-Rad | E7400 / LT7400 | Ø24mm |
Cressington | 108manual / 108auto | Ø57mm |
Cressington | 108auto/SE | Ø57mm |
Cressington | 208HR | Ø57mm |
Denton | Desk II / II / IV / V | Ø60mm |
Edwards | 150B / Scancoat | Ø60mm |
Emitech | SC7620 / SC7610 | Ø57mm |
Emitech on Ø60mm target holder | K500X / K550X / K650X | Ø60mm |
Emitech | K575X &XD / K675X & XD | Ø57mm |
Emitech | Q150 | Ø57mm |
EMS | 150R / 150T / 300R / 300R | Ø57mm |
EMS | K575X &XD / K675X & XD | Ø57mm |
EMS | SC7620 / SC7610 | Ø57mm |
EMS on Ø60mm target holder | K500X / K550X / K650X | Ø60mm |
Emscope on Ø58mm target holder | SC500 / SC500A | Ø58mm |
Emscope | SC502 | Ø57mm |
Fullam | EffaCoater / EMS-76 | Ø50mm |
Gatan | 681 Ion Beam Coater | Ø19mm |
Gatan | 682 PECS Ion Beam Coater | Ø19mm |
Gatan | 685 PECS II Ion Beam Coater | Ø19mm |
Hitachi | MC 1000 | Ø62mm |
HHV | BT150 / BT300 | Ø54mm |
HoYeon | HC21 | Ø57mm |
ISI | ISI 5400 | Ø57mm |
JEOL | JFC-1200 / 1300 / 1400 / 1600 | Ø57mm |
JEOL | JFC-2300HR | Ø57mm |
Leica | EM SCD 005 / 050 / 500 | Ø54mm |
Leica | EM MED 020 | Ø54mm |
Leica | ACE 200 / ACE 600 | Ø54mm |
Pelco | SC4 / SC5 / SC6 / SC7 | Ø57mm |
Polaron / Bio-Rad | E5000 / E5200 / E5400 / E5800 | Ø57mm |
Polaron / Bio-Rad | PS 3 | Ø57mm |
Polaron / Quorum | SC7620 / SC7610 | Ø57mm |
Quorum | Q150R / Q150T / SC7620 | Ø57mm |
Quorum | Q300R / Q300T | Ø57mm |
Quorum | PP2000 / PP2000T | Ø24mm |
Quorum | PP3000T / PP3010T | Ø24mm |
Safematic | CCU-010 | Ø54mm |
SEC | MCM-100 / MCM-200 | Ø50mm |
SPI | SPI-Module | Ø57mm |
SPI | SPI Super | Ø50mm |
VG Microtech / Fisons / Thermo | PP2200 / PP2000T | Ø24mm |